Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Christopher Cheng; Travis Peters; Ajay Dangi; Sumit Agrawal; Haoyang Chen; Sri Rajasekhar Kothapalli; Susan Trolier-McKinstry

doi:10.3390/s22155614

Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Christopher Cheng, Travis Peters, Ajay Dangi, Sumit Agrawal, Haoyang Chen, Sri Rajasekhar Kothapalli, Susan Trolier-McKinstry

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h_31,f. With applied DC biases (up to 15 V) on a 2 μm PbZr_0.52Ti_0.48O₃ film, e_31,f increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by ~2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias.

Original language	English (US)
Article number	5614
Journal	Sensors
Volume	22
Issue number	15
DOIs	https://doi.org/10.3390/s22155614
State	Published - Aug 2022

All Science Journal Classification (ASJC) codes

Analytical Chemistry
Information Systems
Atomic and Molecular Physics, and Optics
Biochemistry
Instrumentation
Electrical and Electronic Engineering

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10.3390/s22155614

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title = "Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition",

abstract = "The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h31,f. With applied DC biases (up to 15 V) on a 2 μm PbZr0.52Ti0.48O3 film, e31,f increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by ~2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias.",

author = "Christopher Cheng and Travis Peters and Ajay Dangi and Sumit Agrawal and Haoyang Chen and Kothapalli, {Sri Rajasekhar} and Susan Trolier-McKinstry",

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AU - Cheng, Christopher

AU - Peters, Travis

AU - Dangi, Ajay

AU - Agrawal, Sumit

AU - Chen, Haoyang

AU - Kothapalli, Sri Rajasekhar

AU - Trolier-McKinstry, Susan

PY - 2022/8

Y1 - 2022/8

N2 - The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h31,f. With applied DC biases (up to 15 V) on a 2 μm PbZr0.52Ti0.48O3 film, e31,f increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by ~2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias.

AB - The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h31,f. With applied DC biases (up to 15 V) on a 2 μm PbZr0.52Ti0.48O3 film, e31,f increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by ~2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias.

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Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Abstract

All Science Journal Classification (ASJC) codes

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