In-Memory Computing Primitive for Sensor Data Fusion in 28 nm HKMG FeFET Technology

K. Ni, B. Grisafe, W. Chakraborty, A. K. Saha, S. Dutta, M. Jerry, J. A. Smith, S. Gupta, S. Datta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

37 Scopus citations

Abstract

In this work, we exploit the spatio-temporal switching dynamics of ferroelectric polarization to realize an energy-efficient, and massively-parallel in-memory computational primitive for at-node sensor data fusion and analytics based on an industrial 28nm HKMG FeFET technology [1]. We demonstrate: (i) the spatio-temporal dynamics of polarization switching in HfO2-based ferroelectrics under the stimuli of sub-coercive voltage pulses using experiments and phase-field modeling; (ii) an inherent rectifying conductance accumulation characteristic in FeFET with a large dynamic range of G/G > 100 in the case of 3.0V, 50ns gate pulses; (iii) transition to more abrupt accumulation characteristics due to single/few domain polarization switching in scaled FeFET (34nm LG); and (iv) successful detection of physiological anomalies from realworld multi-modal sensor data streams.

Original languageEnglish (US)
Title of host publication2018 IEEE International Electron Devices Meeting, IEDM 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages16.1.1-16.1.4
ISBN (Electronic)9781728119878
DOIs
StatePublished - Jul 2 2018
Event64th Annual IEEE International Electron Devices Meeting, IEDM 2018 - San Francisco, United States
Duration: Dec 1 2018Dec 5 2018

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2018-December
ISSN (Print)0163-1918

Conference

Conference64th Annual IEEE International Electron Devices Meeting, IEDM 2018
Country/TerritoryUnited States
CitySan Francisco
Period12/1/1812/5/18

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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