TY - JOUR
T1 - In-plane polarized 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 thin films
AU - Zhou, Qifa
AU - Zhang, Qingqi
AU - Xu, Baomin
AU - Trolier-McKinstry, Susan
PY - 2002/8
Y1 - 2002/8
N2 - Ferroelectric 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-PT) thin films were deposited on ZrO2/SiO2/silicon substrates using a chemical-solution-deposition method. Using a thin PZT film as a seed layer for the PMN-PT films, phase-pure perovskite PMN-PT could be obtained via rapid thermal annealing at 750°C for 60 s. The electrical properties of in-plane polarized thin films were characterized using interdigitated electrode arrays on the film surface. Ferroelectric hysteresis loops are observed with much larger remanent polarizations (∼24 μC/cm2) than for through-the-thickness polarized PMN-PT thin films (10-12 μC/cm2) deposited on Pt/Ti/Si substrates. For a ringer spacing of 20 μm, the piezoelectric voltage sensitivity of in-plane polarized PMN-PT thin films was ∼20 times higher than that of through-the-thickness polarized PMN-PT thin films.
AB - Ferroelectric 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-PT) thin films were deposited on ZrO2/SiO2/silicon substrates using a chemical-solution-deposition method. Using a thin PZT film as a seed layer for the PMN-PT films, phase-pure perovskite PMN-PT could be obtained via rapid thermal annealing at 750°C for 60 s. The electrical properties of in-plane polarized thin films were characterized using interdigitated electrode arrays on the film surface. Ferroelectric hysteresis loops are observed with much larger remanent polarizations (∼24 μC/cm2) than for through-the-thickness polarized PMN-PT thin films (10-12 μC/cm2) deposited on Pt/Ti/Si substrates. For a ringer spacing of 20 μm, the piezoelectric voltage sensitivity of in-plane polarized PMN-PT thin films was ∼20 times higher than that of through-the-thickness polarized PMN-PT thin films.
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U2 - 10.1111/j.1151-2916.2002.tb00394.x
DO - 10.1111/j.1151-2916.2002.tb00394.x
M3 - Article
AN - SCOPUS:0036686018
SN - 0002-7820
VL - 85
SP - 1997
EP - 2000
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 8
ER -