Directed radiation synthesis and modification of materials with multi-component surfaces can lead to the creation of ordered nanostructures. These structures can induce changes in the mechanical and electronic properties of the materials. Ion-induced nanostructures can also change the function (e.g. reflectivity at 13.5-nm) of transition-metal extreme ultraviolet (EUV) reflective coatings (e.g. Ru, Pd, Rh). The effect of ion incident angle on stability of surface structures and their effects on surface properties are investigated. This work presents results for two cases to compare ion-induced structure versus chemical/elemental state. The two cases are Ar+ irradiated III-V compound semiconductor surfaces (e.g. GaSb and InP) and energetic Sn+ particles at normal and grazing incidence. In the first case, XPS spectra are used to illustrate changes in surface composition. Results are compared to simulated data. The second case uses LEISS spectra to monitor changes in surface composition and changes in EUV reflectivity. Both cases serve as motivation for a new experimental facility called PRIHSM.