In-situ vapor phase lubrication of MEMS devices

Seong H. Kim

doi:10.1115/IJTC2007-44418

In-situ vapor phase lubrication of MEMS devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The basic principles, potentials, and challenges of the insitu vapor phase lubrication will be addressed in the MEMS panel discussion.

Original language	English (US)
Title of host publication	2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
Pages	883-884
Number of pages	2
DOIs	https://doi.org/10.1115/IJTC2007-44418
State	Published - 2008
Event	2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 - San Diego, CA, United States Duration: Oct 22 2007 → Oct 24 2007

Publication series

Name	2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
Volume	PART B

Other

Other	2007 ASME/STLE International Joint Tribology Conference, IJTC 2007
Country/Territory	United States
City	San Diego, CA
Period	10/22/07 → 10/24/07

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

Access to Document

10.1115/IJTC2007-44418

Cite this

@inproceedings{1860b8c27011446084e57b4b6853294f,

title = "In-situ vapor phase lubrication of MEMS devices",

abstract = "The basic principles, potentials, and challenges of the insitu vapor phase lubrication will be addressed in the MEMS panel discussion.",

author = "Kim, {Seong H.}",

year = "2008",

doi = "10.1115/IJTC2007-44418",

language = "English (US)",

isbn = "0791848108",

series = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",

pages = "883--884",

booktitle = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",

note = "2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 ; Conference date: 22-10-2007 Through 24-10-2007",

}

Kim, SH 2008, In-situ vapor phase lubrication of MEMS devices. in 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007. 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007, vol. PART B, pp. 883-884, 2007 ASME/STLE International Joint Tribology Conference, IJTC 2007, San Diego, CA, United States, 10/22/07. https://doi.org/10.1115/IJTC2007-44418

TY - GEN

T1 - In-situ vapor phase lubrication of MEMS devices

AU - Kim, Seong H.

PY - 2008

Y1 - 2008

N2 - The basic principles, potentials, and challenges of the insitu vapor phase lubrication will be addressed in the MEMS panel discussion.

AB - The basic principles, potentials, and challenges of the insitu vapor phase lubrication will be addressed in the MEMS panel discussion.

UR - http://www.scopus.com/inward/record.url?scp=43449113894&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=43449113894&partnerID=8YFLogxK

U2 - 10.1115/IJTC2007-44418

DO - 10.1115/IJTC2007-44418

M3 - Conference contribution

AN - SCOPUS:43449113894

SN - 0791848108

SN - 9780791848104

T3 - 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007

SP - 883

EP - 884

BT - 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007

T2 - 2007 ASME/STLE International Joint Tribology Conference, IJTC 2007

Y2 - 22 October 2007 through 24 October 2007

ER -

In-situ vapor phase lubrication of MEMS devices

Abstract

Publication series

Other

All Science Journal Classification (ASJC) codes

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