@inproceedings{1860b8c27011446084e57b4b6853294f,
title = "In-situ vapor phase lubrication of MEMS devices",
abstract = "The basic principles, potentials, and challenges of the insitu vapor phase lubrication will be addressed in the MEMS panel discussion.",
author = "Kim, \{Seong H.\}",
year = "2008",
doi = "10.1115/IJTC2007-44418",
language = "English (US)",
isbn = "0791848108",
series = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",
pages = "883--884",
booktitle = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",
note = "2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 ; Conference date: 22-10-2007 Through 24-10-2007",
}