TY - JOUR
T1 - Inferring ejection distances and a surface energy profile in keV particle bombardment experiments
AU - Delcorte, A.
AU - Segda, B. G.
AU - Garrison, B. J.
AU - Bertrand, P.
N1 - Funding Information:
The authors thank Bruno Schueler and Fraser Reich from PHI-EVANS for their help and advice concerning the KED measurements, as well as Xavier Vanden Eynde for helpful discussion concerning the sputtering of PS. Ricardo Papaleo is gratefully acknowledged for reading and commenting the manuscript. AD is also indebted to Kristin Krantzman for stimulating ideas concerning the energy profile at the sample surface during keV ion bombardment. The financial support of the National Science Foundation through the Chemistry Division, the CRIF program and the MRI program are gratefully acknowledged by AD and BJG. Additional computational resources were provided in part by the IBM Selected University Resource Program and the Center for Academic Computing of Penn State University. We are also indebted to the Center for Academic Computing staff for helping us use the IBM SP computer and for the development of a new graphics software for animation and presentation. The experimental part of this work is supported by the Action de Recherche Concertée (94/99–173) of the Communauté Française de Belgique and by the Belgian Interuniversity Attraction Pole Program (PAI-IUAP P4/10) on Reduced Dimensionality Systems. BGS is supported by a grant from the Belgian Administration Générale de la Coopération au Développement . The ToF-SIMS equipment was acquired with the support of the Région Wallonne and FRFC-Loterie Nationale of Belgium.
PY - 2000/11
Y1 - 2000/11
N2 - The disappearance cross-sections and kinetic energy distributions of fragment ions sputtered from polystyrene thin films under 12 keV 69Ga+ ion bombardment are measured using a time-of-flight spectrometer. Even though the disappearance cross-sections are often used as an indicator of radial ion beam damage, the derived radii range from 2 to 10 angstroms depending on the particular hydrocarbon fragment. Therefore, the disappearance cross-sections cannot be directly related to a single global quantity of damage per incident particle. Likewise, the widths of the measured kinetic energy depend on the particular hydrocarbon fragment. Both the disappearance cross-sections and the widths of the kinetic energy distribution superficially relate to fragment mass but the correlation is not perfect. We develop a hypothesis that the disappearance cross-section and the width of the kinetic energy distribution actually correlate with the ejection radius of the particular fragment. Thus, the kinetic energy distributions provide an estimate of the radial extent of the energy density in the ejection region. Our interpretations are supported by molecular dynamics simulation results. For comparison with previously reported data, our results indicate that the deposited energy profile is 4-5 times narrower than for 72.3 MeV, electronic sputtering of PVDF.
AB - The disappearance cross-sections and kinetic energy distributions of fragment ions sputtered from polystyrene thin films under 12 keV 69Ga+ ion bombardment are measured using a time-of-flight spectrometer. Even though the disappearance cross-sections are often used as an indicator of radial ion beam damage, the derived radii range from 2 to 10 angstroms depending on the particular hydrocarbon fragment. Therefore, the disappearance cross-sections cannot be directly related to a single global quantity of damage per incident particle. Likewise, the widths of the measured kinetic energy depend on the particular hydrocarbon fragment. Both the disappearance cross-sections and the widths of the kinetic energy distribution superficially relate to fragment mass but the correlation is not perfect. We develop a hypothesis that the disappearance cross-section and the width of the kinetic energy distribution actually correlate with the ejection radius of the particular fragment. Thus, the kinetic energy distributions provide an estimate of the radial extent of the energy density in the ejection region. Our interpretations are supported by molecular dynamics simulation results. For comparison with previously reported data, our results indicate that the deposited energy profile is 4-5 times narrower than for 72.3 MeV, electronic sputtering of PVDF.
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U2 - 10.1016/S0168-583X(00)00263-9
DO - 10.1016/S0168-583X(00)00263-9
M3 - Article
AN - SCOPUS:0034320977
SN - 0168-583X
VL - 171
SP - 277
EP - 290
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 3
ER -