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Influence of hydrogen plasma treatment on He implantation-induced nanocavities in silicon
- A. Vengurlekar
- , S. Ashok
- , C. L. Liu
- , E. Ntsoenzok
- , M. F. Barthe
- , P. Desgardin
- , M. O. Ruault
Research output: Contribution to journal › Conference article › peer-review