Influence of microstructure and composition on hydrogenated silicon thin film properties for uncooled microbolometer applications
- D. B. Saint John
- , H. B. Shin
- , M. Y. Lee
- , S. K. Ajmera
- , A. J. Syllaios
- , E. C. Dickey
- , T. N. Jackson
- , N. J. Podraza
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