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Integrated atomistic chemical imaging and reactive force field molecular dynamic simulations on silicon oxidation

  • Santoshrupa Dumpala
  • , Scott R. Broderick
  • , Umedjon Khalilov
  • , Erik C. Neyts
  • , Adri C.T. Van Duin
  • , J. Provine
  • , Roger T. Howe
  • , Krishna Rajan

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