@article{39a4122bfbae434f816b5929a00dcae4,
title = "Intentional carbon doping reveals CH as an abundant charged impurity in nominally undoped synthetic WS2 and WSe2 ",
abstract = "Understanding the physical properties and controlling the generation of intrinsic and extrinsic defects is central to the technological adoption of 2D materials in devices. Here we identify a charged carbon-hydrogen complex at a chalcogen site (CHX) as a common, charged impurity in synthetically grown transition metal dichalcogenides (TMDs). This conclusion is drawn by comparing high resolution scanning probe microscopy measurements of nominally undoped and intentionally carbon doped TMD samples. While CH impurity densities in undoped CVD-grown WS2 and MOCVD-grown WSe2 can range anywhere from parts per million to parts per thousand, CH densities in the percentage levels were selectively generated by a post-synthetic methane plasma treatment. Our study indicates that methane plasma treatment is a selective and clean method for the controlled introduction of a charged carbon-hydrogen complex at a surface chalcogen site, a defect that is commonly present in synthetic TMDs.",
author = "Cochrane, {K. A.} and T. Zhang and A. Kozhakhmetov and Lee, {J. H.} and F. Zhang and C. Dong and Neaton, {J. B.} and Robinson, {J. A.} and M. Terrones and Bargioni, {A. Weber} and B. Schuler",
note = "Funding Information: Original content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Penn State 2D Crystal Consortium (2DCC)-MaterialsInnovation Platform (2DCCMIP) DMR1539916 NSF CAREER Award 1453924 Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy DE-AC02-05CH11231 DE-SC0018025 Air ForceOffice of Scientific Research Hybrid Materials MURI FA9550-18-1-0480 Schweizerischer Nationalfonds zur F�rderung der Wissenschaftlichen Forschung http://dx.doi.org/10.13039/501100001711 P2SKP2171770 Center for Novel Pathways to Quantum Coherence in Materials University of California - National LabCollaborative Research and Training (UC-NL CRT) program Intel through the Semiconductor Research Corporation(SRC) 2746.001 yes � 2020 The Author(s). Published by IOP Publishing Ltd Creative Commons Attribution 4.0 license Publisher Copyright: {\textcopyright} 2020 The Author(s). Published by IOP Publishing Ltd.",
year = "2020",
month = jul,
doi = "10.1088/2053-1583/ab8543",
language = "English (US)",
volume = "7",
journal = "2D Materials",
issn = "2053-1583",
publisher = "IOP Publishing Ltd.",
number = "3",
}