@inproceedings{d74c63a383664ca1aa147928369d55db,
title = "Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications",
abstract = "We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates. After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.",
author = "A. Ebrahimi and Y. Abdi and S. Mohajerzadeh and S. Paydavosi",
year = "2009",
month = jan,
day = "1",
doi = "10.1557/proc-1179-bb06-07",
language = "English (US)",
isbn = "9781615673889",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "82--87",
booktitle = "Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography",
address = "United States",
note = "Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography ; Conference date: 13-04-2009 Through 17-04-2009",
}