Interface preservation during Ge-rich source/drain contact formation

C. Niu, M. Raymond, V. Kamineni, J. Fronheiser, S. Siddiqui, H. Niimi, J. M. Dechene, A. Labonte, P. Adusumilli, A. V. Carr, J. Shearer, J. Demarest, L. Jiang, J. Li, R. W. Hengstebeck

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Interface preservation during Ge-rich source/drain contact formation'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds