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Interface preservation during Ge-rich source/drain contact formation
C. Niu, M. Raymond, V. Kamineni, J. Fronheiser, S. Siddiqui, H. Niimi, J. M. Dechene, A. Labonte, P. Adusumilli, A. V. Carr, J. Shearer, J. Demarest, L. Jiang, J. Li, R. W. Hengstebeck
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution