Abstract
Heterostructures including the members of the 6.1 Å semiconductor family (AlSb, GaSb, and InAs) are used in infrared optoelectronic devices as well as a variety of other applications. Short-period superlattices of these materials are also of interest for creating composite materials with designer infrared dielectric functions. The conditions needed to create sharp InAs/GaSb and InAs/AlSb interfaces are well known but the AlSb/GaSb interface is much less well-understood. In this article, we test a variety of interventions designed to improve interface sharpness in AlSb/GaSb short-period superlattices. These interventions include the substrate temperature, the III:Sb flux ratio, and the use of a bismuth surfactant. Superlattices are characterized by high-resolution x-ray diffraction and infrared spectroscopy. We find that AlSb/GaSb short-period superlattices have a wide growth window over which sharp interfaces can be obtained.
Original language | English (US) |
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Article number | 063406 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 39 |
Issue number | 6 |
DOIs | |
State | Published - Dec 1 2021 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films