Abstract
A heterostructure of (001)PZT(53/47)/(110)SrRuO3(SRO) was deposited on a miscut (001)SrTiO3(ST) substrate by a magnetron sputtering. The film thickness of the PZT and SRO ranged from 100 nm to 200 nm. The miscut angles were typically 1.7°. The heterostructure was grown on the miscut ST substrates under a step-flow growth. The heterostructure was tightly bonded to the ST substrate without an interfacial layer. The sputtered PZT thin films were tetragonally deformed with c=4.16 angstrom (bulk c-lattice parameter, 4.14 angstrom). A room temperature dielectric constant of the PZT thin films was 200 to 300 at 1 kHz. The P/E hysteresis measurements indicated that the saturation polarization Ps was 40 μ C/cm2 with a coercive field Ec of 400 kV/cm to 500 kV/cm. The Ec observed was one order of magnitude higher than a bulk value for PZT. The high values of Ec were observed in a perfect c-domain orientation without an interfacial layer or 90° domains.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 39-46 |
| Number of pages | 8 |
| Journal | Integrated Ferroelectrics |
| Volume | 26 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1999 |
| Event | The 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA Duration: Mar 7 1999 → Mar 10 1999 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
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