Introduction to the special issue on high-k dielectric reliability

John F. Conley; Gennadi Bersuker; Patrick M. Lenahan

doi:10.1109/TDMR.2005.847999

Introduction to the special issue on high-k dielectric reliability

John F. Conley
, Gennadi Bersuker
, Patrick M. Lenahan

Engineering Science and Mechanics

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	3-4
Number of pages	2
Journal	IEEE Transactions on Device and Materials Reliability
Volume	5
Issue number	1
DOIs	https://doi.org/10.1109/TDMR.2005.847999
State	Published - Mar 2005

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Safety, Risk, Reliability and Quality
Electrical and Electronic Engineering

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10.1109/TDMR.2005.847999

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title = "Introduction to the special issue on high-k dielectric reliability",

author = "Conley, \{John F.\} and Gennadi Bersuker and Lenahan, \{Patrick M.\}",

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issn = "1530-4388",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

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AU - Lenahan, Patrick M.

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JO - IEEE Transactions on Device and Materials Reliability

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Introduction to the special issue on high-k dielectric reliability

All Science Journal Classification (ASJC) codes

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