TY - GEN
T1 - Investigation of a slab on grade supporting sensitive equipment
AU - Barben, B. R.
AU - Hanagan, L. M.
N1 - Publisher Copyright:
© The Society for Experimental Mechanics, Inc. 2014.
PY - 2014
Y1 - 2014
N2 - With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.
AB - With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.
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U2 - 10.1007/978-3-319-04546-7_7
DO - 10.1007/978-3-319-04546-7_7
M3 - Conference contribution
AN - SCOPUS:84988683841
SN - 9783319007762
T3 - Conference Proceedings of the Society for Experimental Mechanics Series
SP - 53
EP - 60
BT - Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics
PB - Springer New York LLC
T2 - 32nd IMAC Conference and Exposition on Structural Dynamics, 2014
Y2 - 3 February 2014 through 6 February 2014
ER -