TY - GEN
T1 - Investigation of Micro-scale Materials Behavior with MEMS
AU - Haque, M. A.
AU - Saif, M. T.A.
N1 - Funding Information:
This research was funded by NSF Career Grant ECS 97-34368. The actuators were fabricated in the Cornell Nanofabrication Facility at Cornell University. The specimens were fabricated in the Frederick Seitz Materials Research Laboratory at the University of Illinois at Urbana-Champaign. We acknowledge Chad Sager for his help in device fabrication.
Funding Information:
This research was funded by NSF Career Grant ECS 97- 34368. The actuators were fabricated in the Cornell Nanofabrication Facility at Cornell University. The specimens were fabricated in the Frederick Seitz Materials Research Laboratory at the University of Illinois at Urbana-Champaign. We acknowledge Chad Sager for his help in device fabrication.
Publisher Copyright:
© 1999 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1999
Y1 - 1999
N2 - This study presents a methodology for uniaxial tension testing of both micron and sub-micron scale specimens using MEMS devices. The methodology allows free standing, single or multi-layered specimens to be fabricated separately from the MEMS device. The MEMS device is a comb drive actuator which can be calibrated for force measurement. Materials behavior can be observed in-situ in analytical chambers such as SEM and TEM and under different environmental conditions. The methodology is demonstrated with the testing of a free standing polymer and an Aluminum specimen with thickness 1.3 microns and 110 nanometers respectively. Significant deviation in materials behavior is observed between bulk and micro-scale.
AB - This study presents a methodology for uniaxial tension testing of both micron and sub-micron scale specimens using MEMS devices. The methodology allows free standing, single or multi-layered specimens to be fabricated separately from the MEMS device. The MEMS device is a comb drive actuator which can be calibrated for force measurement. Materials behavior can be observed in-situ in analytical chambers such as SEM and TEM and under different environmental conditions. The methodology is demonstrated with the testing of a free standing polymer and an Aluminum specimen with thickness 1.3 microns and 110 nanometers respectively. Significant deviation in materials behavior is observed between bulk and micro-scale.
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U2 - 10.1115/IMECE1999-0281
DO - 10.1115/IMECE1999-0281
M3 - Conference contribution
AN - SCOPUS:0005487091
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 283
EP - 288
BT - Micro-Electro-Mechanical Systems (MEMS)
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999
Y2 - 14 November 1999 through 19 November 1999
ER -