Investigation of Micro-scale Materials Behavior with MEMS

M. A. Haque, M. T.A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations


This study presents a methodology for uniaxial tension testing of both micron and sub-micron scale specimens using MEMS devices. The methodology allows free standing, single or multi-layered specimens to be fabricated separately from the MEMS device. The MEMS device is a comb drive actuator which can be calibrated for force measurement. Materials behavior can be observed in-situ in analytical chambers such as SEM and TEM and under different environmental conditions. The methodology is demonstrated with the testing of a free standing polymer and an Aluminum specimen with thickness 1.3 microns and 110 nanometers respectively. Significant deviation in materials behavior is observed between bulk and micro-scale.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages6
ISBN (Electronic)9780791816387
StatePublished - 1999
EventASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999 - Nashville, United States
Duration: Nov 14 1999Nov 19 1999

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)


ConferenceASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999
Country/TerritoryUnited States

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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