Investigation of polarity effects on the degradation of Pd/Ti/Pt ohmic contacts to p-type SiC under current stress

Keyphrases

• Ohmic Contact 100%
• TiAl 100%
• Direct Current 100%
• Current Stressing 100%
• Current Stress 100%
• P-type 4H-SiC 100%
• Al Contacts 100%
• Pt Contacts 100%
• Metallization 50%
• Overlayer 25%
• High Temperature 25%
• High Current Density 25%
• Degradation Behavior 25%
• Annealing Temperature 25%
• Duty Cycle 25%
• Surface Morphology 25%
• Reduction Temperature 25%
• Total Resistance 25%
• Pulsed Direct Current 25%
• Low Resistance 25%
• Low Contact Resistance 25%

Engineering

• Ohmic Contacts 100%
• Direct Current 100%
• Metallizations 40%
• Leading Edge 20%
• High Current Density 20%
• Annealing Temperature 20%
• Surface Morphology 20%
• Anodes and Cathode 20%
• Duty Cycle 20%
• Reduced Temperature 20%
• Smoother Surface 20%

Material Science

• Cathode 100%
• Anode 66%
• Density 33%
• Contact Resistance 33%
• Surface Morphology 33%
• Annealing Temperature 33%