Investigation of sputtered indium-tin oxide/silicon interfaces: Ion damage, hydrogen passivation and low-temperature anneal

K. Kuwano, S. Ashok

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Fingerprint

Dive into the research topics of 'Investigation of sputtered indium-tin oxide/silicon interfaces: Ion damage, hydrogen passivation and low-temperature anneal'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds