Ion and neutral yields from ion bombarded metal surfaces during chemisorption using low dose SIMS and multiphoton resonance ionization

F. M. Kimock; J. P. Baxter; N. Winograd

doi:10.1016/0039-6028(83)90790-2

Ion and neutral yields from ion bombarded metal surfaces during chemisorption using low dose SIMS and multiphoton resonance ionization

F. M. Kimock, J. P. Baxter, N. Winograd

Research output: Contribution to journal › Article › peer-review

57 Scopus citations

Abstract

Multiphoton resonance ionization (MPRI) of sputtered neutrals is compared to low dose secondary ion mass spectrometry via the chemisorption of oxygen on polycrystalline indium. The results show that the In and In₂ yields decrease with oxidation while the In⁺ and In₂ ⁺ yields increase dramatically. The behavior of the In₂/In ratio is similar to that of the In₂ ⁺/In⁺ ratio. The high sensitivity of MPRI indicates there should be a number of advantages of this technique over SIMS for surface characterization studies.

Original language	English (US)
Pages (from-to)	L41-L48
Journal	Surface Science
Volume	124
Issue number	2-3
DOIs	https://doi.org/10.1016/0039-6028(83)90790-2
State	Published - Jan 2 1983

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0039-6028(83)90790-2

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title = "Ion and neutral yields from ion bombarded metal surfaces during chemisorption using low dose SIMS and multiphoton resonance ionization",

abstract = "Multiphoton resonance ionization (MPRI) of sputtered neutrals is compared to low dose secondary ion mass spectrometry via the chemisorption of oxygen on polycrystalline indium. The results show that the In and In2 yields decrease with oxidation while the In+ and In2 + yields increase dramatically. The behavior of the In2/In ratio is similar to that of the In2 +/In+ ratio. The high sensitivity of MPRI indicates there should be a number of advantages of this technique over SIMS for surface characterization studies.",

author = "Kimock, {F. M.} and Baxter, {J. P.} and N. Winograd",

note = "Funding Information: The financial support of the National Science Foundation, the Office of Naval Research, the Air Force Office of Scientific Research and the Petroleum Research Foundation is gratefully acknowledged.",

year = "1983",

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T1 - Ion and neutral yields from ion bombarded metal surfaces during chemisorption using low dose SIMS and multiphoton resonance ionization

AU - Kimock, F. M.

AU - Baxter, J. P.

AU - Winograd, N.

N1 - Funding Information: The financial support of the National Science Foundation, the Office of Naval Research, the Air Force Office of Scientific Research and the Petroleum Research Foundation is gratefully acknowledged.

PY - 1983/1/2

Y1 - 1983/1/2

N2 - Multiphoton resonance ionization (MPRI) of sputtered neutrals is compared to low dose secondary ion mass spectrometry via the chemisorption of oxygen on polycrystalline indium. The results show that the In and In2 yields decrease with oxidation while the In+ and In2 + yields increase dramatically. The behavior of the In2/In ratio is similar to that of the In2 +/In+ ratio. The high sensitivity of MPRI indicates there should be a number of advantages of this technique over SIMS for surface characterization studies.

AB - Multiphoton resonance ionization (MPRI) of sputtered neutrals is compared to low dose secondary ion mass spectrometry via the chemisorption of oxygen on polycrystalline indium. The results show that the In and In2 yields decrease with oxidation while the In+ and In2 + yields increase dramatically. The behavior of the In2/In ratio is similar to that of the In2 +/In+ ratio. The high sensitivity of MPRI indicates there should be a number of advantages of this technique over SIMS for surface characterization studies.

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JF - Surface Science

IS - 2-3

ER -

Ion and neutral yields from ion bombarded metal surfaces during chemisorption using low dose SIMS and multiphoton resonance ionization

Abstract

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