Abstract
Electron beam-physical vapor deposition (EB-PVD) is a relatively new technology that has overcome some of the difficulties associated with chemical vapor deposition, physical vapor deposition, and thermal spray processes. In the EB-PVD process, focused high-energy electron beams generated from electron guns are directed to melt and evaporate ingots, as well as preheat the substrate inside a vacuum chamber. By adding the assistance of ion beams to the process, coating density and adhesion are improved, while costs are reduced. This article describes ion-beam processes, explains the advantages of EB-PVD, shows how ion beams optimize the benefits of EB-PVD, and enumerates a variety of applications.
Original language | English (US) |
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Pages | 27-28 |
Number of pages | 2 |
Volume | 150 |
No | 6 |
Specialist publication | Advanced Materials and Processes |
State | Published - Dec 1996 |
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- General Materials Science