Keyphrases
Ion Beam
100%
Dielectric Properties
100%
Thin-film Silicon
100%
Silicon Dioxide Films
100%
Proton Beam Therapy
100%
Dielectric Constant
50%
Metallization
50%
Frequency Dispersion
50%
Silicon Wafer
50%
Extremely Low Frequency
50%
Hysteresis Effect
50%
Subsurface Layer
50%
Si Ions
50%
Accumulation Capacitance
50%
SiO2 Layer
50%
Oxide Dielectrics
50%
MOS Structure
50%
C-V Measurement
50%
Material Science
Film
100%
Silicon Dioxide
100%
Dielectric Property
100%
Silicon
50%
Oxide Compound
50%
Permittivity
50%
Capacitance
50%
Silicon Wafer
50%
Silicon Ion
50%
Chemistry
Ion Beam
100%
Liquid Film
100%
Dielectric Property
100%
Silicon Dioxide
100%
Silicon
66%
Dielectric Constant
33%
Silicon Ion
33%
Engineering
Dielectrics
100%
Subsurface
33%
Frequency Dispersion
33%
Silicon Wafer
33%
Metallizations
33%
Sio2 Layer
33%
Hysteresis Effect
33%