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Ion beam techniques for low K materials characterization
H. Bakhru, A. Kumar, T. Kaplan, M. Delarosa, J. Fortin, G. R. Yang, T. M. Lu, S. Kim, C. Steinbruchel, X. Tang, J. A. Moore, B. Wang, J. McDonald, S. Nitta, V. Pisupatti, al et al
Research output: Contribution to journal › Conference article › peer-review
4
Scopus
citations