Ion beam techniques for low K materials characterization

  • H. Bakhru
  • , A. Kumar
  • , T. Kaplan
  • , M. Delarosa
  • , J. Fortin
  • , G. R. Yang
  • , T. M. Lu
  • , S. Kim
  • , C. Steinbruchel
  • , X. Tang
  • , J. A. Moore
  • , B. Wang
  • , J. McDonald
  • , S. Nitta
  • , V. Pisupatti
  • , al et al

Research output: Contribution to journal › Conference article › peer-review

4   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Ion beam techniques for low K materials characterization'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science

Chemistry