@inproceedings{1ceb956dbc7149cd8ee9623cec5b1979,
title = "Isolating a scanning electron microscope from chiller unit vibrations",
abstract = "Although a scanning electron microscope (SEM) has very low tolerance to being disturbed by vibration, it requires a chiller for operation. Isolating the SEM from its associated chiller vibration takes careful consideration. This paper presents a case study of the performance of several slab-on-grade configurations. These configurations were specifically constructed to support various water chiller units and other service equipment as well as various vibration sensitive microscopes in a high performance research facility. In this study, the slabs are subjected to shaker-induced harmonic loading similar to that of a water chiller unit used to cool a SEM. The actual performance will be discussed in the context of generic design criteria for sensitive equipment and the SEM manufacturer-specified design criteria.",
author = "Barben, {B. R.} and Hanagan, {L. M.}",
note = "Publisher Copyright: {\textcopyright} The Society for Experimental Mechanics, Inc. 2015.; 33rd IMAC, Conference and Exposition on Balancing Simulation and Testing, 2015 ; Conference date: 02-02-2015 Through 05-02-2015",
year = "2015",
doi = "10.1007/978-3-319-15248-6_53",
language = "English (US)",
isbn = "9783319152479",
series = "Conference Proceedings of the Society for Experimental Mechanics Series",
publisher = "Springer New York LLC",
pages = "531--540",
editor = "Shamim Pakzad and Juan Caicedo",
booktitle = "Dynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015",
}