Isolating a scanning electron microscope from chiller unit vibrations

B. R. Barben, L. M. Hanagan

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Although a scanning electron microscope (SEM) has very low tolerance to being disturbed by vibration, it requires a chiller for operation. Isolating the SEM from its associated chiller vibration takes careful consideration. This paper presents a case study of the performance of several slab-on-grade configurations. These configurations were specifically constructed to support various water chiller units and other service equipment as well as various vibration sensitive microscopes in a high performance research facility. In this study, the slabs are subjected to shaker-induced harmonic loading similar to that of a water chiller unit used to cool a SEM. The actual performance will be discussed in the context of generic design criteria for sensitive equipment and the SEM manufacturer-specified design criteria.

Original languageEnglish (US)
Title of host publicationDynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015
EditorsShamim Pakzad, Juan Caicedo
PublisherSpringer New York LLC
Number of pages10
ISBN (Print)9783319152479
StatePublished - 2015
Event33rd IMAC, Conference and Exposition on Balancing Simulation and Testing, 2015 - Orlando, United States
Duration: Feb 2 2015Feb 5 2015

Publication series

NameConference Proceedings of the Society for Experimental Mechanics Series
ISSN (Print)2191-5644
ISSN (Electronic)2191-5652


Other33rd IMAC, Conference and Exposition on Balancing Simulation and Testing, 2015
Country/TerritoryUnited States

All Science Journal Classification (ASJC) codes

  • General Engineering
  • Computational Mechanics
  • Mechanical Engineering


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