Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

Honghua Du; Cheryl A. Houser; Richard E. Tressler; Karl E. Spear; Carlo G. Pantano

doi:10.1149/1.2086543

Isotopic Studies of Oxidation of Si₃N₄ and Si using SIMS

Honghua Du
, Cheryl A. Houser
, Richard E. Tressler
, Karl E. Spear
, Carlo G. Pantano

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	741-742
Number of pages	2
Journal	Journal of the Electrochemical Society
Volume	137
Issue number	2
DOIs	https://doi.org/10.1149/1.2086543
State	Published - Feb 1990

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

Access to Document

10.1149/1.2086543

Cite this

@article{17b2eb1a48374e87ab1fc4744d88e968,

title = "Isotopic Studies of Oxidation of Si3N4 and Si using SIMS",

author = "Honghua Du and Houser, \{Cheryl A.\} and Tressler, \{Richard E.\} and Spear, \{Karl E.\} and Pantano, \{Carlo G.\}",

year = "1990",

month = feb,

doi = "10.1149/1.2086543",

language = "English (US)",

volume = "137",

pages = "741--742",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Institute of Physics",

number = "2",

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T1 - Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

AU - Du, Honghua

AU - Houser, Cheryl A.

AU - Tressler, Richard E.

AU - Spear, Karl E.

AU - Pantano, Carlo G.

PY - 1990/2

Y1 - 1990/2

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U2 - 10.1149/1.2086543

DO - 10.1149/1.2086543

M3 - Article

AN - SCOPUS:0025383921

SN - 0013-4651

VL - 137

SP - 741

EP - 742

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 2