Abstract
Molecular-dynamics simulations have been performed for the keV particle bombardment of Si{110} and Si{100} using a many-body potential developed by Tersoff. Energy and angle distributions are presented along with an analysis of the important ejection mechanisms. We have developed a computer logic that only integrates the equations of motion of the atoms that are struck, thus decreasing the computer time by a factor of 3 from a complete molecular-dynamics simulation.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 93-101 |
| Number of pages | 9 |
| Journal | Physical Review B |
| Volume | 40 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1989 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics