Kinetic roughening in polymer film growth by vapor deposition

Y. P. Zhao, J. B. Fortin, G. Bonvallet, G. C. Wang, T. M. Lu

Research output: Contribution to journalArticlepeer-review

89 Scopus citations


The dynamic scaling properties of Parylene films grown by vapor deposition polymerization were studied. It was observed that the roughening behavior belongs to a novel universality class involving a bulk diffusion mechanism. At room temperature, growth was nonstationery for various growth rates.

Original languageEnglish (US)
Pages (from-to)3229-3232
Number of pages4
JournalPhysical review letters
Issue number15
StatePublished - Oct 9 2000

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


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