Abstract
The dynamic scaling properties of Parylene films grown by vapor deposition polymerization were studied. It was observed that the roughening behavior belongs to a novel universality class involving a bulk diffusion mechanism. At room temperature, growth was nonstationery for various growth rates.
Original language | English (US) |
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Pages (from-to) | 3229-3232 |
Number of pages | 4 |
Journal | Physical review letters |
Volume | 85 |
Issue number | 15 |
DOIs | |
State | Published - Oct 9 2000 |
All Science Journal Classification (ASJC) codes
- General Physics and Astronomy