Large-Scale Fabrication of Submicrometer-Gate-Length MOSFETs with a Trilayer PtSe2 Channel Grown by Molecular Beam Epitaxy

Kuanchen Xiong, James C.M. Hwang, Maria Hilse, Lei Li, Alexander Goritz, Marco Lisker, Matthias Wietstruck, Mehmet Kaynak, Roman Engel-Herbert, Asher Madjar

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