TY - JOUR
T1 - Laser ablation of organic polymers
T2 - Microscopic models for photochemical and thermal processes
AU - Garrison, Barbara Jane
AU - Srinivasan, R.
PY - 1985/12/1
Y1 - 1985/12/1
N2 - Irradiation of organic polymers by short pulses of far-UV (e.g., 193 nm) laser light causes ablative photodecomposition (APD) of the material. This etching process occurs cleanly leaving behind a well-defined pit. Longer wavelength (e.g., 532 nm) laser light also ablates material from a polymeric solid. However, this process is distinct from APD in that the sample near the pit is distorted and melted. Microscopic models are presented here for both the photochemical and thermal processes. The photochemical model predicts that well-defined pits will be formed, that narrow angular distributions of the ablated material should be observed, and that the average perpendicular ejection velocity will be 1000-2000 m/s. The thermal model predicts melting or distortion of the solid and a broad angular distribution of the ejected material.
AB - Irradiation of organic polymers by short pulses of far-UV (e.g., 193 nm) laser light causes ablative photodecomposition (APD) of the material. This etching process occurs cleanly leaving behind a well-defined pit. Longer wavelength (e.g., 532 nm) laser light also ablates material from a polymeric solid. However, this process is distinct from APD in that the sample near the pit is distorted and melted. Microscopic models are presented here for both the photochemical and thermal processes. The photochemical model predicts that well-defined pits will be formed, that narrow angular distributions of the ablated material should be observed, and that the average perpendicular ejection velocity will be 1000-2000 m/s. The thermal model predicts melting or distortion of the solid and a broad angular distribution of the ejected material.
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U2 - 10.1063/1.335230
DO - 10.1063/1.335230
M3 - Article
AN - SCOPUS:0001679756
SN - 0021-8979
VL - 57
SP - 2909
EP - 2914
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 8
ER -