TY - GEN
T1 - Laser-assisted writing of copper films through Nd:YAG laser radiation
AU - Martukanitz, R.
AU - Harster, R.
AU - Conklin, D.
AU - Wagner, S.
PY - 2004/12/1
Y1 - 2004/12/1
N2 - The use of a laser-assisted process for direct writing of copper films and coatings has significant potential for several applications within the electronics industry. Experiments were conducted using a pulsed Nd:YAG (1064 nm) laser to irradiate a metallo-organic precursor film that had been predeposited onto glass and FR-4 substrates. Parameters that were investigated included irradiation wavelength, pulsing conditions, precursor thickness, and the use of inert and active shielding gas. Scanning electron microscopy, energy dispersive x-ray spectroscopy, and electrical resistivity measurements were used to characterize the processed specimens. Initial results of these experiments indicated that Nd:YAG irradiation resulted in decomposition of the precursor and deposition of copper; although, the crystalline deposits contained varying levels of oxide. It is believed that the decomposition mechanism is pyrolytic.
AB - The use of a laser-assisted process for direct writing of copper films and coatings has significant potential for several applications within the electronics industry. Experiments were conducted using a pulsed Nd:YAG (1064 nm) laser to irradiate a metallo-organic precursor film that had been predeposited onto glass and FR-4 substrates. Parameters that were investigated included irradiation wavelength, pulsing conditions, precursor thickness, and the use of inert and active shielding gas. Scanning electron microscopy, energy dispersive x-ray spectroscopy, and electrical resistivity measurements were used to characterize the processed specimens. Initial results of these experiments indicated that Nd:YAG irradiation resulted in decomposition of the precursor and deposition of copper; although, the crystalline deposits contained varying levels of oxide. It is believed that the decomposition mechanism is pyrolytic.
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M3 - Conference contribution
AN - SCOPUS:56749148638
SN - 0912035773
SN - 9780912035772
T3 - ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
BT - ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
T2 - ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
Y2 - 4 October 2004 through 7 October 2004
ER -