Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Hyun Uk Kim, Vishwas Bedekar, Rashed Adnan Islam, Woo Ho Lee, Don Leo, Shashank Priya

Research output: Contribution to journalArticlepeer-review

42 Scopus citations


In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

Original languageEnglish (US)
Article number4626918
Pages (from-to)1900-1905
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number9
StatePublished - Sep 2008

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


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