Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Hyun Uk Kim; Vishwas Bedekar; Rashed Adnan Islam; Woo Ho Lee; Don Leo; Shashank Priya

doi:10.1109/TUFFC.881

Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Hyun Uk Kim
, Vishwas Bedekar
, Rashed Adnan Islam
, Woo Ho Lee
, Don Leo
, Shashank Priya

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s²). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm³.

Original language	English (US)
Article number	4626918
Pages (from-to)	1900-1905
Number of pages	6
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	55
Issue number	9
DOIs	https://doi.org/10.1109/TUFFC.881
State	Published - Sep 2008

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.881

Cite this

@article{e81325b106ac42f4bef07c0c22825297,

title = "Laser-machined piezoelectric cantilevers for mechanical energy harvesting",

abstract = "In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.",

author = "Kim, \{Hyun Uk\} and Vishwas Bedekar and Islam, \{Rashed Adnan\} and Lee, \{Woo Ho\} and Don Leo and Shashank Priya",

note = "Funding Information: Manuscript received January 9, 2007; accepted April 6, 2008. The authors gratefully acknowledge the support of Texas Advanced Research Program. H. Kim, V. Bedekar, and R. A. Islam are with Materials Science and Engineering, University of Texas, Arlington, TX. W.-H. Lee is with the Automation \& Robotics Research Institute, Fort Worth, TX. D. Leo and S. Priya are with the Center for Intelligent Material Systems and Structures (CIMSS), Mechanical Engineering, Virginia Tech, Blacksburg, VA (e-mail: [email protected]). Digital Object Identifier 10.1109/TUFFC.881",

year = "2008",

month = sep,

doi = "10.1109/TUFFC.881",

language = "English (US)",

volume = "55",

pages = "1900--1905",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "9",

}

TY - JOUR

T1 - Laser-machined piezoelectric cantilevers for mechanical energy harvesting

AU - Kim, Hyun Uk

AU - Bedekar, Vishwas

AU - Islam, Rashed Adnan

AU - Lee, Woo Ho

AU - Leo, Don

AU - Priya, Shashank

N1 - Funding Information: Manuscript received January 9, 2007; accepted April 6, 2008. The authors gratefully acknowledge the support of Texas Advanced Research Program. H. Kim, V. Bedekar, and R. A. Islam are with Materials Science and Engineering, University of Texas, Arlington, TX. W.-H. Lee is with the Automation & Robotics Research Institute, Fort Worth, TX. D. Leo and S. Priya are with the Center for Intelligent Material Systems and Structures (CIMSS), Mechanical Engineering, Virginia Tech, Blacksburg, VA (e-mail: [email protected]). Digital Object Identifier 10.1109/TUFFC.881

PY - 2008/9

Y1 - 2008/9

N2 - In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

AB - In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

UR - https://www.scopus.com/pages/publications/52749088724

UR - https://www.scopus.com/pages/publications/52749088724#tab=citedBy

U2 - 10.1109/TUFFC.881

DO - 10.1109/TUFFC.881

M3 - Article

C2 - 18986886

AN - SCOPUS:52749088724

SN - 0885-3010

VL - 55

SP - 1900

EP - 1905

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 9

M1 - 4626918

ER -

Laser-machined piezoelectric cantilevers for mechanical energy harvesting

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