Lead-zirconate-titanate-based piezoelectric micromachined switch

S. J. Gross, S. Tadlgadapa, T. N. Jackson, S. Trolier-McKinstry, Q. Q. Zhang

Research output: Contribution to journalArticlepeer-review

92 Scopus citations


A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.

Original languageEnglish (US)
Pages (from-to)174-176
Number of pages3
JournalApplied Physics Letters
Issue number1
StatePublished - Jul 7 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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