Lead zirconate titanate films for d33 mode cantilever actuators

Q. Q. Zhang; S. J. Gross; S. Tadigadapa; T. N. Jackson; F. T. Djuth; S. Trolier-McKinstry

doi:10.1016/S0924-4247(03)00068-2

Lead zirconate titanate films for d₃₃ mode cantilever actuators

Q. Q. Zhang, S. J. Gross, S. Tadigadapa, T. N. Jackson, F. T. Djuth, S. Trolier-McKinstry

Research output: Contribution to journal › Article › peer-review

90 Scopus citations

Abstract

Piezoelectric Pb(Zr_0.52Ti_0.48)O₃ (PZT 52/48) cantilever actuators that operate in the d₃₃ mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (Si_xN_y) support buffered by a layer of ZrO₂. Au/Cr interdigitated (IDT) electrodes were deposited on the PZT film surface, so that the cantilever could be poled and actuated in the d₃₃ mode. The PZT deposited on the ZrO₂/Si_xN_y/Si stack is well-crystallized into the perovskite phase and is randomly oriented. It exhibits good ferroelectric behavior with a remanent polarization of 26 μC/cm². The cantilevers have a width of 100 μm and lengths between 130 and 280 μm. The fundamental resonance frequencies are in the range of 6.1-29.6 kHz. When actuated with an applied electric voltage of 100 V, the 280 μm long cantilever exhibits a large downward tip displacement of 30 μm.

Original language	English (US)
Pages (from-to)	91-97
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	105
Issue number	1
DOIs	https://doi.org/10.1016/S0924-4247(03)00068-2
State	Published - Jun 15 2003

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/S0924-4247(03)00068-2

Cite this

@article{604b7ad8671944fc817ad0e81e250771,

title = "Lead zirconate titanate films for d33 mode cantilever actuators",

abstract = "Piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT 52/48) cantilever actuators that operate in the d33 mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (SixNy) support buffered by a layer of ZrO2. Au/Cr interdigitated (IDT) electrodes were deposited on the PZT film surface, so that the cantilever could be poled and actuated in the d33 mode. The PZT deposited on the ZrO2/SixNy/Si stack is well-crystallized into the perovskite phase and is randomly oriented. It exhibits good ferroelectric behavior with a remanent polarization of 26 μC/cm2. The cantilevers have a width of 100 μm and lengths between 130 and 280 μm. The fundamental resonance frequencies are in the range of 6.1-29.6 kHz. When actuated with an applied electric voltage of 100 V, the 280 μm long cantilever exhibits a large downward tip displacement of 30 μm.",

author = "Zhang, {Q. Q.} and Gross, {S. J.} and S. Tadigadapa and Jackson, {T. N.} and Djuth, {F. T.} and S. Trolier-McKinstry",

note = "Funding Information: The authors gratefully acknowledge support from the US Army under contract DAAH01-00-C-R146 and a grant from the Northrop Grumman Corporation. They also thank the Electrical and Computer Engineering department at Carnegie Mellon University for use of their Xenon Difluoride etch tool and University of Minnesota for depositing Si x N y . ",

year = "2003",

month = jun,

day = "15",

doi = "10.1016/S0924-4247(03)00068-2",

language = "English (US)",

volume = "105",

pages = "91--97",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Lead zirconate titanate films for d33 mode cantilever actuators

AU - Zhang, Q. Q.

AU - Gross, S. J.

AU - Tadigadapa, S.

AU - Jackson, T. N.

AU - Djuth, F. T.

AU - Trolier-McKinstry, S.

N1 - Funding Information: The authors gratefully acknowledge support from the US Army under contract DAAH01-00-C-R146 and a grant from the Northrop Grumman Corporation. They also thank the Electrical and Computer Engineering department at Carnegie Mellon University for use of their Xenon Difluoride etch tool and University of Minnesota for depositing Si x N y .

PY - 2003/6/15

Y1 - 2003/6/15

N2 - Piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT 52/48) cantilever actuators that operate in the d33 mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (SixNy) support buffered by a layer of ZrO2. Au/Cr interdigitated (IDT) electrodes were deposited on the PZT film surface, so that the cantilever could be poled and actuated in the d33 mode. The PZT deposited on the ZrO2/SixNy/Si stack is well-crystallized into the perovskite phase and is randomly oriented. It exhibits good ferroelectric behavior with a remanent polarization of 26 μC/cm2. The cantilevers have a width of 100 μm and lengths between 130 and 280 μm. The fundamental resonance frequencies are in the range of 6.1-29.6 kHz. When actuated with an applied electric voltage of 100 V, the 280 μm long cantilever exhibits a large downward tip displacement of 30 μm.

AB - Piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT 52/48) cantilever actuators that operate in the d33 mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (SixNy) support buffered by a layer of ZrO2. Au/Cr interdigitated (IDT) electrodes were deposited on the PZT film surface, so that the cantilever could be poled and actuated in the d33 mode. The PZT deposited on the ZrO2/SixNy/Si stack is well-crystallized into the perovskite phase and is randomly oriented. It exhibits good ferroelectric behavior with a remanent polarization of 26 μC/cm2. The cantilevers have a width of 100 μm and lengths between 130 and 280 μm. The fundamental resonance frequencies are in the range of 6.1-29.6 kHz. When actuated with an applied electric voltage of 100 V, the 280 μm long cantilever exhibits a large downward tip displacement of 30 μm.

UR - http://www.scopus.com/inward/record.url?scp=0038321291&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038321291&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(03)00068-2

DO - 10.1016/S0924-4247(03)00068-2

M3 - Article

AN - SCOPUS:0038321291

SN - 0924-4247

VL - 105

SP - 91

EP - 97

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1

ER -

Lead zirconate titanate films for d₃₃ mode cantilever actuators

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this