Lead zirconate titanate films for d33 mode cantilever actuators

Q. Q. Zhang, S. J. Gross, S. Tadigadapa, T. N. Jackson, F. T. Djuth, S. Trolier-McKinstry

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88 Scopus citations


Piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT 52/48) cantilever actuators that operate in the d33 mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (SixNy) support buffered by a layer of ZrO2. Au/Cr interdigitated (IDT) electrodes were deposited on the PZT film surface, so that the cantilever could be poled and actuated in the d33 mode. The PZT deposited on the ZrO2/SixNy/Si stack is well-crystallized into the perovskite phase and is randomly oriented. It exhibits good ferroelectric behavior with a remanent polarization of 26 μC/cm2. The cantilevers have a width of 100 μm and lengths between 130 and 280 μm. The fundamental resonance frequencies are in the range of 6.1-29.6 kHz. When actuated with an applied electric voltage of 100 V, the 280 μm long cantilever exhibits a large downward tip displacement of 30 μm.

Original languageEnglish (US)
Pages (from-to)91-97
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number1
StatePublished - Jun 15 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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