Abstract
The OAQC (optimizing adaptive quality controller) is a process optimization and control software tool recently developed for application in run-to-run (R2R) manufacturing environments. Its most recent version is the result of the evolution of R2R applications of adaptive control techniques for linear unconstrained single input, single output (SISO) systems; liner unconstrained multiple input, multiple output (MIMO) systems; and nonlinear, constrained MIMO systems.
Original language | English (US) |
---|---|
Title of host publication | Run-to-Run Control in Semiconductor Manufacturing |
Publisher | CRC Press |
Pages | 81-89 |
Number of pages | 9 |
ISBN (Electronic) | 9781420040661 |
ISBN (Print) | 0849311780, 9780849311789 |
State | Published - Jan 1 2000 |
All Science Journal Classification (ASJC) codes
- General Engineering