Learning and optimization algorithms for an optimizing adaptive quality controller

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The OAQC (optimizing adaptive quality controller) is a process optimization and control software tool recently developed for application in run-to-run (R2R) manufacturing environments. Its most recent version is the result of the evolution of R2R applications of adaptive control techniques for linear unconstrained single input, single output (SISO) systems; liner unconstrained multiple input, multiple output (MIMO) systems; and nonlinear, constrained MIMO systems.

Original languageEnglish (US)
Title of host publicationRun-to-Run Control in Semiconductor Manufacturing
PublisherCRC Press
Pages81-89
Number of pages9
ISBN (Electronic)9781420040661
ISBN (Print)0849311780, 9780849311789
StatePublished - Jan 1 2000

All Science Journal Classification (ASJC) codes

  • General Engineering

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