TY - GEN
T1 - Length-scale dependence of elasticity in nanocrystalline materials for mems applications
AU - Haque, M. A.
AU - Saif, M. T.A.
PY - 2002
Y1 - 2002
N2 - Length-scale dependence of the elastic properties of thin film materials bears significance in the design of Micro-electronic and Micro-electro- mechanical (MEMS) systems , which are usually desired to operate in the elastic range under different operational loading conditions. In this study, we investigate elastic properties of freestanding ultra-high purity Aluminum and Gold thin films with thickness varying from 30 to 350 nanometers. Uniaxial tension test results indicate that for truly polycrystalline films , Young's modulus can be as low as 85% and 60% of the bulk value for Aluminum and Gold respectively with average grain size of 20 nanometers. We present, for the first time, the evidence of non-linear elasticity with total strain up to 1.0% in nanocrystalline thin films and attempt to provide fundamental understanding of the length-scale dependence of elasticity in thin films with a simple model based on inter-atomic force-distance relationships.
AB - Length-scale dependence of the elastic properties of thin film materials bears significance in the design of Micro-electronic and Micro-electro- mechanical (MEMS) systems , which are usually desired to operate in the elastic range under different operational loading conditions. In this study, we investigate elastic properties of freestanding ultra-high purity Aluminum and Gold thin films with thickness varying from 30 to 350 nanometers. Uniaxial tension test results indicate that for truly polycrystalline films , Young's modulus can be as low as 85% and 60% of the bulk value for Aluminum and Gold respectively with average grain size of 20 nanometers. We present, for the first time, the evidence of non-linear elasticity with total strain up to 1.0% in nanocrystalline thin films and attempt to provide fundamental understanding of the length-scale dependence of elasticity in thin films with a simple model based on inter-atomic force-distance relationships.
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U2 - 10.1115/IMECE2002-33297
DO - 10.1115/IMECE2002-33297
M3 - Conference contribution
AN - SCOPUS:78249267614
SN - 0791836428
SN - 9780791836422
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 161
EP - 164
BT - Microelectromechanical Systems
PB - American Society of Mechanical Engineers (ASME)
ER -