Longitudinal-bending mode micromotor using multilayer piezoelectric actuator

Kui Yao, Burhanettin Koc, Kenji Uchino

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


Longitudinal-bending mode ultrasonic motors with a diameter of 3 mm were fabricated using stacked multilayer piezoelectric actuators, which were self-developed from hard lead zirconate titanate (PZT) ceramic. A bending vibration was converted from a longitudinal vibration with a longitudinal-bending coupler. The motors could be bidirectionally operated by changing driving frequency. Their starting and braking torque were analyzed based on the transient velocity response. With a load of moment of inertia 2.5 × 10 -7 kgm 2, the motor showed a maximum starting torque of 127.5 μNm. The braking torque proved to be a constant independent on the motor's driving conditions and was roughly equivalent to the maximum starting torque achievable with our micromotors.

Original languageEnglish (US)
Pages (from-to)1066-1071
Number of pages6
JournalIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Issue number4
StatePublished - Jul 2001

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


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