Low angle annular dark field scanning transmission electron microscopy analysis of phase change material

J. Li, K. Brew, K. Cheng, V. Chan, N. Arnold, A. Gasasira, R. Pujari, J. Demarest, M. Iwatake, L. Tierney, O. Ogundipe, K. Toole, N. Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The continuously growing demands in high-density memories drive the rapid development of advanced memory technologies. In this work, we investigate the mushroom type PCM cells based on Ge2Sb2Te5 at nanoscale by low angle annular dark field (LAADF) STEM imaging technique as well as energy dispersive X-ray spectroscopy (EDX) to study the changes in microstructure and elemental distributions in PCM mushroom cells before and after SET and RESET conditions. We describe the microscope settings used for LAADF image formation to reveal the amorphous dome in RESET device and discuss the application example in failure analysis of PCM test device.

Original languageEnglish (US)
Title of host publicationISTFA 2021
Subtitle of host publicationProceedings from the 47th International Symposium for Testing and Failure Analysis Conference
PublisherASM International
Pages206-210
Number of pages5
ISBN (Electronic)9781627084215
DOIs
StatePublished - 2021
Event47th International Symposium for Testing and Failure Analysis Conference, ISTFA 2021 - Phoenix, United States
Duration: Oct 31 2021Nov 4 2021

Publication series

NameConference Proceedings from the International Symposium for Testing and Failure Analysis
Volume2021-October

Conference

Conference47th International Symposium for Testing and Failure Analysis Conference, ISTFA 2021
Country/TerritoryUnited States
CityPhoenix
Period10/31/2111/4/21

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

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