Low-permittivity nanocomposite materials using sculptured thin film technology

Vijayakumar C. Venugopal; Akhlesh Lakhtakia; Russell Messier; John Paul Kucera

doi:10.1116/1.591146

Low-permittivity nanocomposite materials using sculptured thin film technology

Vijayakumar C. Venugopal, Akhlesh Lakhtakia, Russell Messier, John Paul Kucera

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

The low-permittivity columnar thin films (LPCTFs) is used as low-permittivity, nanocomposite materials that is applied in microelectronics and electronic packaging. The design and engineering of LPCTFs to obtain desired anisotropic dielectric properties is demonstrated using a Bruggeman formalism. The performance of LPCTFs is improved through various enhancements. Surface modifications, such as fluorination to reduce the relative permittivity as well as to determine moisture adsorption in the internal surfaces, are viable because of the open porous structure.

Original language	English (US)
Pages (from-to)	32-36
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	1
DOIs	https://doi.org/10.1116/1.591146
State	Published - Jan 2000

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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Low-permittivity nanocomposite materials using sculptured thin film technology

Abstract

All Science Journal Classification (ASJC) codes

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