Low-temperature radiation damage in silicon. I. Annealing studies on n-type material

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The presence of electrically active defects in electron irradiated P-doped n-type silicon was monitored using capacitance and loss factor measurements. Irradiations were performed at temperatures {less-than or approximate}12 K with electrons of energies {less-than or approximate}1.50MeV. Seemingly, the concentration of single vacancies on the irradiated samples is low. This is deduced from the small recovery in the samples properties observed upon annealing at ∼75 K. Also two annealing stages observed at ∼140-150 K and ∼240 K are attributed to the self-interstitial. Electron traps observed at ∼(Ec - 0.14) eV and (E - 0.24) eV in the ga p are ascribed to the carbon interstitial and to the divacancy, respectively.

Original languageEnglish (US)
Pages (from-to)341-350
Number of pages10
JournalPhysica B+C
Issue number3
StatePublished - 1987

All Science Journal Classification (ASJC) codes

  • General Engineering


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