Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications

Gokhan Hatipoglu; Srinivas Tadigadapa

doi:10.1109/TRANSDUCERS.2015.7181046

Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications

Gokhan Hatipoglu, Srinivas Tadigadapa

Materials Research Institute (MRI)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas^® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

Original language	English (US)
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	807-810
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181046
State	Published - Aug 5 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	6/21/15 → 6/25/15

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2015.7181046

Cite this

Hatipoglu, G., & Tadigadapa, S. (2015). Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 807-810). Article 7181046 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181046

Hatipoglu, Gokhan ; Tadigadapa, Srinivas. / Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 807-810 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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title = "Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications",

abstract = "This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas{\textregistered} film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.",

author = "Gokhan Hatipoglu and Srinivas Tadigadapa",

year = "2015",

month = aug,

day = "5",

doi = "10.1109/TRANSDUCERS.2015.7181046",

language = "English (US)",

series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

address = "United States",

note = "18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

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Hatipoglu, G & Tadigadapa, S 2015, Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181046, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 807-810, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181046

Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. / Hatipoglu, Gokhan; Tadigadapa, Srinivas.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 807-810 7181046 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications

AU - Hatipoglu, Gokhan

AU - Tadigadapa, Srinivas

PY - 2015/8/5

Y1 - 2015/8/5

N2 - This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

AB - This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

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BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Y2 - 21 June 2015 through 25 June 2015

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Hatipoglu G, Tadigadapa S. Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 807-810. 7181046. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7181046

Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications

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