Materials Research Society Symposium - Proceedings: Preface

Mark I. Gardner, Stefan De Gendt, Jon Paul Maria, Susanne Stemmer

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	xiii
Journal	Materials Research Society Symposium - Proceedings
Volume	745
State	Published - Jan 1 2002
Event	Novel Materials and Processes for Advanced CMOS - Boston, MA, United States Duration: Dec 2 2002 → Dec 4 2002

All Science Journal Classification (ASJC) codes

@article{4cdf4f1770f14ee4ab188b151001d61c,

title = "Materials Research Society Symposium - Proceedings: Preface",

author = "Gardner, {Mark I.} and {De Gendt}, Stefan and Maria, {Jon Paul} and Susanne Stemmer",

year = "2002",

month = jan,

day = "1",

language = "English (US)",

volume = "745",

pages = "xiii",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Novel Materials and Processes for Advanced CMOS ; Conference date: 02-12-2002 Through 04-12-2002",

}

TY - JOUR

T1 - Materials Research Society Symposium - Proceedings

T2 - Novel Materials and Processes for Advanced CMOS

AU - Gardner, Mark I.

AU - De Gendt, Stefan

AU - Maria, Jon Paul

AU - Stemmer, Susanne

PY - 2002/1/1

Y1 - 2002/1/1

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M3 - Conference article

AN - SCOPUS:0038293357

SN - 0272-9172

VL - 745

SP - xiii

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

Y2 - 2 December 2002 through 4 December 2002

ER -