Materials Studies of GHZ Split-Ring Resonator Plasma Generators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microwave-driven microplasmas have generated interest since they offer many favorable qualities such as the ability to produce high-electron densities while causing little sputtering damage1. Such interest has led to studies of breakdown mechanisms at high-frequencies and small gap sizes2-3. Of particular interest for our work is the generation of microplasmas using microwave resonators since they allow high-electric fields with low power input. A missing aspect of the current literature is the comparative study of the influence of different materials on breakdown and resonator performance. By using different materials it may be possible, for instance, to help elucidate the importance of various breakdown mechanisms. For our materials studies we utilize screen-printed, split-ring resonators (SRRs) for the generation of plasma. The SRRs are fabricated out of both gold and silver. These materials differ in conductivity, work function, and chemical reactivity.

Original languageEnglish (US)
Title of host publicationICOPS 2018 - 45th IEEE International Conference on Plasma Science
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538645895
DOIs
StatePublished - Jun 24 2018
Event45th IEEE International Conference on Plasma Science, ICOPS 2018 - Denver, United States
Duration: Jun 24 2018Jun 28 2018

Publication series

NameIEEE International Conference on Plasma Science
Volume2018-June
ISSN (Print)0730-9244

Conference

Conference45th IEEE International Conference on Plasma Science, ICOPS 2018
Country/TerritoryUnited States
CityDenver
Period6/24/186/28/18

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Materials Studies of GHZ Split-Ring Resonator Plasma Generators'. Together they form a unique fingerprint.

Cite this