Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

H. Maiwa, J. P. Maria, J. A. Christman, S. H. Kim, S. K. Streiffer, A. I. Kingon

Research output: Contribution to journalConference articlepeer-review

26 Scopus citations


The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(ZrxTi1-x)O3 (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d33 occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d33 values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.

Original languageEnglish (US)
Pages (from-to)139-146
Number of pages8
JournalIntegrated Ferroelectrics
Issue number1
StatePublished - 1999
EventThe 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA
Duration: Mar 7 1999Mar 10 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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