Measurement, modeling and characterization of embedded capacitors for power delivery in the mid-frequency range

Prathap Muthana, Ege Engin, Madhavan Swaminathan, Rao Tummala, Venkatesh Sundaram, Lixi Wan, S. K. Bhattacharya, P. M. Raj, K. J. Lee, Mahesh Varadarajan, Isaac Robin Abothu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Embedded passives are becoming increasingly important for next generation miniaturized systems through the gradual replacement of discrete passives. The need for embedded passives arises from a reduction in size of electronic products thus requiring the components to be smaller. Integration of these passives in the package increases the real estate for active components and can lead to an increase in the functionality of future systems. Among the passives such as capacitors, resistors and inductors, capacitors are the most challenging to integrate due to the large capacitance ranges required for proper decoupling for today's systems. The capacitance required can range from 0.1pF to a few micro farads. This paper focuses on the modeling, measurement and characterization of hydrothermal thin film barium titanate and nano composite capacitors. The thickness of the thin film capacitors range from 0.3um to 0.9um and that of the nano composite capacitor is 12um. The measurement of these capacitors will be done by using a 2 port measurement methodology with a VNA covering a frequency range of 50MHz to 4GHz. Correlation of the measurement results will be done by modeling the structures by using the Transmission Matrix method.

Original languageEnglish (US)
Title of host publicationProceedings - 2005 International Symposium on Microelectronics, IMAPS 2005
Pages506-510
Number of pages5
StatePublished - 2005
Event38th International Symposium on Microelectronics, IMAPS 2005 - Philadelphia, PA, United States
Duration: Sep 25 2005Sep 29 2005

Publication series

NameProceedings - 2005 International Symposium on Microelectronics, IMAPS 2005

Other

Other38th International Symposium on Microelectronics, IMAPS 2005
Country/TerritoryUnited States
CityPhiladelphia, PA
Period9/25/059/29/05

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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