Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

F. Xu; F. Chu; J. F. Shepard; Susan E. Trolier-McKinstry

Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

F. Xu, F. Chu, J. F. Shepard, Susan E. Trolier-McKinstry

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d₃₃ values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

Original language	English (US)
Pages (from-to)	427-432
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	493
State	Published - Jan 1 1998
Event	Proceedings of the 1997 MRS Fall Symposium - Boston, MA, USA Duration: Nov 30 1997 → Dec 4 1997

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

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title = "Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect",

abstract = "This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.",

author = "F. Xu and F. Chu and Shepard, {J. F.} and Trolier-McKinstry, {Susan E.}",

year = "1998",

month = jan,

day = "1",

language = "English (US)",

volume = "493",

pages = "427--432",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1997 MRS Fall Symposium ; Conference date: 30-11-1997 Through 04-12-1997",

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TY - JOUR

T1 - Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

AU - Xu, F.

AU - Chu, F.

AU - Shepard, J. F.

AU - Trolier-McKinstry, Susan E.

PY - 1998/1/1

Y1 - 1998/1/1

N2 - This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

AB - This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

UR - http://www.scopus.com/inward/record.url?scp=0031679766&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031679766&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0031679766

SN - 0272-9172

VL - 493

SP - 427

EP - 432

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1997 MRS Fall Symposium

Y2 - 30 November 1997 through 4 December 1997

ER -

Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

Abstract

All Science Journal Classification (ASJC) codes

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