Abstract
This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 427-432 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 493 |
| State | Published - Jan 1 1998 |
| Event | Proceedings of the 1997 MRS Fall Symposium - Boston, MA, USA Duration: Nov 30 1997 → Dec 4 1997 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
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