Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts

Keyphrases

• Axially Symmetric 33%
• Conventional Instruments 33%
• Cutting Tool 33%
• Drive Mechanism 33%
• Form Error 33%
• High-aspect-ratio Microstructures 33%
• Mechanical Design 100%
• Metrology 66%
• Micromachining 33%
• Nanopositioning Stage 33%
• Physical Principles 33%
• Precision Instrument 100%
• Scanning Tunneling Microscope 33%
• Sensitive Direction 33%
• Small Hole 33%
• Surface Topography 33%
• Traction Drive 33%
• Tunneling 33%
• Working Principle 33%

Engineering

• Drive Mechanism 33%
• Form Error 33%
• High Aspect Ratio 33%
• Macroscale 33%
• Mechanical Design 100%
• Micro Machining 33%
• Microstructure 33%
• Physical Principle 33%
• Precision Instrument 100%
• Roundness 100%
• Scanning Tunneling Microscope 33%
• Surface Topography 33%
• Tunnel Construction 33%