MEMS-based force sensor: Design and applications

Daniel López; Ricardo S. Decca; Ephraim Fischbach; Dennis E. Krause

doi:10.1002/bltj.20104

MEMS-based force sensor: Design and applications

Daniel López, Ricardo S. Decca, Ephraim Fischbach, Dennis E. Krause

Electrical Engineering

Research output: Contribution to journal › Review article › peer-review

27 Scopus citations

Abstract

Micromachined force detectors are extremely sensitive instruments capable of measuring forces as small as 10^-15 N. We describe one such instrument that combines a novel micromachined torsional oscillator with an interferometric position-sensing mechanism that allows fine control of vertical scans. The design, fabrication, and operation of MEMS-based force sensors are described. The sensitivity and unique features of micromachined torsional oscillators allow us to undertake experiments that set new constraints on corrections to Newtonian gravitational forces at separations below 1 μm. Moreover, the measurements provide the most precise characterization of quantum vacuum fluctuation forces to date.

Original language	English (US)
Pages (from-to)	61-80
Number of pages	20
Journal	AT&T Technical Journal
Volume	10
Issue number	3
DOIs	https://doi.org/10.1002/bltj.20104
State	Published - 2005

All Science Journal Classification (ASJC) codes

General Engineering

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10.1002/bltj.20104

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title = "MEMS-based force sensor: Design and applications",

abstract = "Micromachined force detectors are extremely sensitive instruments capable of measuring forces as small as 10-15 N. We describe one such instrument that combines a novel micromachined torsional oscillator with an interferometric position-sensing mechanism that allows fine control of vertical scans. The design, fabrication, and operation of MEMS-based force sensors are described. The sensitivity and unique features of micromachined torsional oscillators allow us to undertake experiments that set new constraints on corrections to Newtonian gravitational forces at separations below 1 μm. Moreover, the measurements provide the most precise characterization of quantum vacuum fluctuation forces to date.",

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AU - López, Daniel

AU - Decca, Ricardo S.

AU - Fischbach, Ephraim

AU - Krause, Dennis E.

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Y1 - 2005

N2 - Micromachined force detectors are extremely sensitive instruments capable of measuring forces as small as 10-15 N. We describe one such instrument that combines a novel micromachined torsional oscillator with an interferometric position-sensing mechanism that allows fine control of vertical scans. The design, fabrication, and operation of MEMS-based force sensors are described. The sensitivity and unique features of micromachined torsional oscillators allow us to undertake experiments that set new constraints on corrections to Newtonian gravitational forces at separations below 1 μm. Moreover, the measurements provide the most precise characterization of quantum vacuum fluctuation forces to date.

AB - Micromachined force detectors are extremely sensitive instruments capable of measuring forces as small as 10-15 N. We describe one such instrument that combines a novel micromachined torsional oscillator with an interferometric position-sensing mechanism that allows fine control of vertical scans. The design, fabrication, and operation of MEMS-based force sensors are described. The sensitivity and unique features of micromachined torsional oscillators allow us to undertake experiments that set new constraints on corrections to Newtonian gravitational forces at separations below 1 μm. Moreover, the measurements provide the most precise characterization of quantum vacuum fluctuation forces to date.

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JO - AT&T Technical Journal

JF - AT&T Technical Journal

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MEMS-based force sensor: Design and applications

Abstract

All Science Journal Classification (ASJC) codes

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